Patent · US Active

Method for detecting and controlling supply of an immersion medium

US9753266B2 · kind B2 · utility

0Cited by
3References
10Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 30, 2014
Grant dateSep 5, 2017
Priority date
Expiry dateJul 15, 2034

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B21/244
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A method for detecting and controlling supply of an immersion medium into an immersion film region between the front lens of a microscope objective and a preparation, particularly in automated microscopes, using a light source which is reflected into the microscope beam path by means of a beam splitter. The state of the immersion film region is recorded and evaluated in a detection unit of the microscope or a detection unit of the autofocus device through an autofocus signal of the light source and/or a reflection of a modulation object arranged in the intermediate image plane of an incident light illumination, and is transmitted to a control unit for the purpose of a change or an error treatment of the immersion process.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.