Method for detecting and controlling supply of an immersion medium
US9753266B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 30, 2014 |
| Grant date | Sep 5, 2017 |
| Priority date | — |
| Expiry date | Jul 15, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/244
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for detecting and controlling supply of an immersion medium into an immersion film region between the front lens of a microscope objective and a preparation, particularly in automated microscopes, using a light source which is reflected into the microscope beam path by means of a beam splitter. The state of the immersion film region is recorded and evaluated in a detection unit of the microscope or a detection unit of the autofocus device through an autofocus signal of the light source and/or a reflection of a modulation object arranged in the intermediate image plane of an incident light illumination, and is transmitted to a control unit for the purpose of a change or an error treatment of the immersion process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.