Adaptable end effector
US9754812B2 · kind B2 · utility
2Cited by
12References
23Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 18, 2016 |
| Grant date | Sep 5, 2017 |
| Priority date | — |
| Expiry date | Feb 18, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68707
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
An adaptable end effector may include a substrate interface may be configured to support a substrate. The substrate interface may include multiple groups of vacuum openings that are associated with a plurality of types of substrates. A vacuum system may be configured to supply vacuum only to one or more selected groups of vacuum openings that are associated with a given type of substrates when the adaptable end effector supports a substrate of the given type of substrates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.