Polymer, organic layer composition, organic layer, and method of forming patterns
US9758612B2 · kind B2 · utility
1Cited by
0References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 3, 2015 |
| Grant date | Sep 12, 2017 |
| Priority date | — |
| Expiry date | Nov 3, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/0271
- WIPO fieldMacromolecular chemistry, polymers
- WIPO sectorChemistry
Abstract
A polymer, an organic layer composition, an organic layer, and a method of forming patterns, the polymer including a moiety represented by the following Chemical Formula 1:
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.