Substrate supporting unit and substrate processing apparatus manufacturing method of the substrate supporting unit
US9761473B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 24, 2012 |
| Grant date | Sep 12, 2017 |
| Priority date | — |
| Expiry date | Apr 23, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49764
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Provided are a substrate supporting unit and a substrate processing apparatus, and a method of manufacturing the substrate supporting unit. The substrate supporting unit includes a susceptor on which a substrate is placed on a top surface thereof, one or more heat absorbing members which are capable of being converted between a mounted position at which the heat absorbing member is disposed on an upper portion of the susceptor to thermally contact the susceptor and a released position at which the heat absorbing member is separated from the upper portion of the susceptor, the one or more heat absorbing members absorbing heat of the susceptor at the mounted position, and an edge ring having a plurality of fixing slots in which the heat absorbing members are selectively inserted and fixed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.