Hai Won Kim
21Patents
4h-index
26Co-inventors
63Inventor score
Filing activity: Nov 27, 2000 → Aug 9, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9425057B2 | Method and apparatus for manufacturing three-dimensional-structure memory device | Electricity | 51 | Active |
| US6869874B2 | Method for fabricating contact plug with low contact resistance | Electricity | 5 | Expired |
| US6478873B1 | Method of optimizing process of selective epitaxial growth | Chemistry; Metallurgy | 4 | Expired |
| US6784068B2 | Capacitor fabrication method | Electricity | 4 | Expired |
| US7688570B2 | Capacitor with nanotubes and method for fabricating the same | Electricity | 3 | Active |
| US7723189B2 | Method for manufacturing semiconductor device having recess gate | Electricity | 3 | Active |
| US6566189B2 | Method for manufacturing gate in semiconductor device | Electricity | 2 | Expired |
| US7387929B2 | Capacitor in semiconductor device and method of manufacturing the same | Electricity | 1 | Expired |
| US7463476B2 | Capacitor with nanotubes and method for fabricating the same | Electricity | 1 | Expired |
| US8828890B2 | Method for depositing cyclic thin film | Electricity | 1 | Active |
| US9818604B2 | Method for depositing insulating film on recessed portion having high aspect ratio | Electricity | 1 | Active |
| US9761473B2 | Substrate supporting unit and substrate processing apparatus manufacturing method of the substrate supporting unit | Emerging Cross-Sectional Technologies | 1 | Active |
| US9396954B2 | Method and apparatus for manufacturing three-dimensional-structure memory device | Electricity | 0 | Active |
| US9721798B2 | Method and apparatus for depositing amorphous silicon film | Electricity | 0 | Active |
| US9312125B2 | Cyclic deposition method for thin film formation, semiconductor manufacturing method, and semiconductor device | Electricity | 0 | Active |
| US12328877B2 | Vertical semiconductor device and method for fabricating the vertical semiconductor device | Electricity | 0 | Active |
| US8937012B2 | Production method for semiconductor device | Electricity | 0 | Active |
| US11751395B2 | Vertical semiconductor device and method for fabricating the vertical semiconductor device | Electricity | 0 | Active |
| US10006121B2 | Method and apparatus for manufacturing three-dimensional-structure memory device | Chemistry; Metallurgy | 0 | Active |
| US9741574B2 | Cyclic deposition method for thin film and manufacturing method for semiconductor, and semiconductor device | Electricity | 0 | Active |
| US11244956B2 | Vertical semiconductor device and method for fabricating the vertical semiconductor device | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.