Micromechanical component and corresponding test method for a micromechanical component

US9764945B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Sebastian Reiss · Reutlingen, DE
• Simon Armbruster · Wannweil, DE
• Helmut Grutzeck · Tübingen, DE
• Joerg Muchow · Reutlingen, DE
• Frederic Njikam Njimonzie · Reutlingen, DE
• Johannes Baader · Glückstadt, DE
• Rainer Straub · Entringen, DE
• Wolfgang Heinzelmann · Kirchentellinsfurt, DE

Key dates

• Filing date: Aug 28, 2014
• Grant date: Sep 19, 2017
• Expiry date: Jul 8, 2035

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81B2201/042
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

A micromechanical component and a corresponding test method for a micromechanical component are described. The micromechanical component includes at least one first region, which is elastically connected to a second region via a spring device, a resistor element, which is situated in and/or on the spring device and is at least partially interruptible in the event of damage to the spring device, and a detection device, which is electrically connected to the resistor element, for detecting an interruption in the resistor element and for generating a corresponding detection signal.