Patent · US Active

Semiconductor device and method of manufacturing the same

US9768233B1 · kind B1 · utility

12Cited by
5References
11Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 18, 2016
Grant dateSep 19, 2017
Priority date
Expiry dateMar 18, 2036

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D88/00
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A semiconductor device according to an embodiment includes: a stacked body including a plurality of first conductive films stacked via an inter-layer insulating film; a first conductive body facing the stacked body to extend in a stacking direction; and a plurality of first insulating films in the same layers as the first conductive films and disposed between the first conductive body and the first conductive films, the first conductive body including a projecting part that projects along tops of one of the first insulating films and one of the first conductive films, and a lower surface of the projecting part contacting an upper surface of the one of the first conductive films.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.