Trigate transistor structure with unrecessed field insulator and thinner electrodes over the field insulator

US9768249B2 · kind B2 · utility

Assignee

• Intel Corporation · US

Inventors

• Michael L. Hattendorf · Beaverton, US
• Pragyansri Pathi · Portland, US
• Michael K. Harper · Hillsboro, US

Key dates

• Filing date: Jun 26, 2013
• Grant date: Sep 19, 2017
• Expiry date: Jun 26, 2033

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10D64/518

Abstract

Techniques related to integrated circuits having MOSFETs with an unrecessed field insulator and thinner electrodes over the field insulator of ICs, systems incorporating such integrated circuits, and methods for forming them are discussed.