Method for measuring the distance between a workpiece and a machining head of a laser machining apparatus
US9770783B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 31, 2015 |
| Grant date | Sep 26, 2017 |
| Priority date | — |
| Expiry date | Mar 1, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B21/042
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
According to a method for measuring the distance between a workpiece and a machining head of a laser machining apparatus, a machining head is provided, which has a housing that has an interior and an opening for emergence of the laser radiation from the machining head. The laser radiation is directed on to the workpiece, after it has passed through the interior and the opening. An object beam is directed on to the workpiece by a light source of an optical coherence tomograph in such a manner that the object beam passes through the interior and the opening before being incident upon the workpiece. In addition to the object beam, a measuring beam passes through the interior. The measuring beam is used to compensate falsifications of the measured distance that have been caused by pressure fluctuations in the interior. The measuring beam in this case may be reflected at a reflective face that is formed on an inner face of an outlet nozzle that comprises the opening, which inner face delimits the interior.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.