Imprint apparatus and article manufacturing method
US9770850B2 · kind B2 · utility
1Cited by
1References
14Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Apr 16, 2014 |
| Grant date | Sep 26, 2017 |
| Priority date | — |
| Expiry date | Sep 5, 2035 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB29L2031/34
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
Provided is an imprint apparatus that imprints a pattern formed on a mold onto a substrate. The imprint apparatus includes a substrate holder that holds the substrate and can move in a direction along the surface of the substrate; a gas supply unit for supplying a gas into a space between a pattern part of the mold and the substrate; and a wall part that is disposed so as to enclose the space that is supplied with gas, wherein at a position opposed to the substrate and the mold, the wall part faces the substrate holder or the substrate with a gap therebetween.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.