Flying sensor head
US9772183B2 · kind B2 · utility
1Cited by
3References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 27, 2013 |
| Grant date | Sep 26, 2017 |
| Priority date | — |
| Expiry date | Apr 19, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/005
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present disclosure provides a system and method of optical inspection of substrates that have relative large variations in topography. The present disclosure provides a system wherein optical components of the optical inspection system can be automatically moved vertically towards or away from the substrate during optical inspection of the substrate. The system moves the optics in a controlled and precise manner, thereby enabling accurate on-the-fly inspection of substrates having a large variation in topography.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.