Target material thickness measuring apparatus
US9778024B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jul 28, 2015 |
| Grant date | Oct 3, 2017 |
| Priority date | — |
| Expiry date | Jul 28, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2210/42
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Embodiments of the present invention disclose a target material thickness measuring apparatus including: a support; and a plurality of distance measuring units mounted on the support and arranged in a first direction, the plurality of distance measuring units being configured to respectively measure thicknesses of portions of a target material at a plurality of positions in the first direction. A plurality of thickness values of different portions of the target material along a straight line can be obtained at one time, for example, by performing a single measurement of thicknesses of the portions of the target material at the plurality of positions by means of the plurality of distance measuring units, thereby improving measurement efficiency.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.