Object carrier, system and method for back light inspection
US9778192B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 26, 2015 |
| Grant date | Oct 3, 2017 |
| Priority date | — |
| Expiry date | Jun 25, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/062
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An object carrier, a system and a method is disclosed for the back light inspection of transparent or semitransparent objects. The carrier has a carrier base layer with photo luminescent properties which carries the transparent or semitransparent object on top of the layer. The transparent or semitransparent object could be a wafer and the object carrier could be a wafer chuck. At least one light source being arranged above the object carrier such that excitation light emitted from the at least one light source is directed through the transparent or semitransparent object to the layer with photo luminescent properties. The light returned from the layer with photo luminescent properties is collected by an objective and registered by a sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.