Patent · US Active

Backside semiconductor growth

US9780210B1 · kind B1 · utility

45Cited by
7References
30Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 11, 2016
Grant dateOct 3, 2017
Priority date
Expiry dateAug 11, 2036

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D30/0212
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

An integrated circuit structure may include a transistor on a front-side semiconductor layer supported by an isolation layer. The transistor is a first source/drain/body region. The integrated circuit structure may also include a raised source/drain/body region coupled to a backside of the first source/drain/body region of the transistor. The transistor is a raised source/drain/body region extending from the backside of the first source/drain/body region toward a backside dielectric layer supporting the isolation layer. The integrated circuit structure may further include a backside metallization coupled to the raised source/drain/body region.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.