Patent · US Active

Method for making a suspended membrane structure with buried electrode

US9783407B2 · kind B2 · utility

1Cited by
4References
16Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 11, 2012
Grant dateOct 10, 2017
Priority date—
Expiry dateJul 11, 2032

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB81B2207/07
  • WIPO fieldMicro-structural and nano-technology
  • WIPO sectorChemistry

Abstract

A microsystem and/or nanosystem type device is disclosed, comprising:

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.