Structure of MEMS electroacoustic transducer
US9783408B2 · kind B2 · utility
1Cited by
6References
8Claims
0Family size
Assignee
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Key dates
| Filing date | Jun 18, 2014 |
| Grant date | Oct 10, 2017 |
| Priority date | — |
| Expiry date | Jun 18, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49002
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A structure of micro-electro-mechanical systems (MEMS) electroacoustic transducer is disclosed. The MEMS electroacoustic transducer includes a substrate having a MEMS device region, a diaphragm having openings and disposed in the MEMS device region, a silicon material layer disposed on the diaphragm and sealing the diaphragm, and a conductive pattern disposed beneath the diaphragm in the MEMS device region. Preferably, a first cavity is also formed between the diaphragm and the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.