Patent · US Active

Niobium-containing film forming compositions and vapor deposition of niobium-containing films

US9786671B2 · kind B2 · utility

2Cited by

0References

19Claims

0Family size

Assignee

L'Air Liquide, Societe Anonyme Pour l'Etude et l'Exploitation des Procedes Georges Claude · FR

Inventors

Clément Lansalot-Matras · Tsukuba, JP
Wontae Noh · Seoul, KR

Key dates

Filing date	Apr 15, 2016
Grant date	Oct 10, 2017
Priority date	—
Expiry date	Apr 15, 2036

Classification

Technology area (CPC H)Electricity
CPC primaryH10D1/692
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

Niobium-containing film forming compositions are disclosed, along with methods of synthesizing the same, and methods of forming Niobium-containing films on one or more substrates via vapor deposition processes using the Niobium-containing film forming compositions.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.