Determining a thickness of individual layers of a plurality of metal layers
US9791257B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 30, 2015 |
| Grant date | Oct 17, 2017 |
| Priority date | — |
| Expiry date | Apr 18, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B7/06
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Techniques are described to determine a thickness of individual layers of a plurality of metal layers that include a first metal layer disposed on a polymer material and a second metal layer disposed on the first layer, such that the first layer is between the polymer material and the second layer. A measurement device may determine a resistance of the plurality of metal layers and calculate (e.g., estimate) a thickness of the individual layers based on the resistance of the individual layers and based on a resistivity of individual metals used in the plurality of metal layers. The measurement device may determine whether the individual thicknesses are within predetermined thickness ranges to determine whether to pass a quality control test.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.