Semiconductor inspection and metrology system using laser pulse multiplier
US9793673B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 1, 2012 |
| Grant date | Oct 17, 2017 |
| Priority date | — |
| Expiry date | Mar 30, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/0697
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pulse multiplier includes a polarizing beam splitter, a wave plate, and a set of mirrors. The polarizing beam splitter receives an input laser pulse. The wave plate receives light from the polarized beam splitter and generates a first set of pulses and a second set of pulses. The first set of pulses has a different polarization than the second set of pulses. The polarizing beam splitter, the wave plate, and the set of mirrors create a ring cavity. The polarizing beam splitter transmits the first set of pulses as an output of the pulse multiplier and reflects the second set of pulses into the ring cavity. This pulse multiplier can inexpensively reduce the peak power per pulse while increasing the number of pulses per second with minimal total power loss.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.