Method and system for determining the spatial structure of an object

US9797804B2 · kind B2 · utility

Assignees

• Carl Zeiss Vision International GmbH · DE
• Carl Zeiss AG · DE

Inventors

• Carsten Glasenapp · Oberkochen, DE
• Matthias Hornauer · Lauchheim, DE
• Adalbert Hanssen · Aalen, DE
• Yvonne Schleitzer · Jena, DE
• Lars Omlor · Dublin, US

Key dates

• Filing date: Nov 2, 2015
• Grant date: Oct 24, 2017
• Expiry date: Nov 2, 2035

Classification

• Technology area (CPC G): Physics
• CPC primary: G01M11/025
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The spatial structure of an optical element is determined. The optical element has a first optically active surface and a second optically active surface. The optical element is arranged in a holding device. The position of a point (P) on the first optically active surface and the position of a point (P′) on the second optically active surface are referenced in a coordinate system fixed to the holding device. The topography of the first optically active surface is determined in a coordinate system referenced to the holding device by the position of point (P) and the spatial structure of the optical element is calculated from the topography of the first optically active surface and from a data set as to the topography of the second optically active surface. The data set is referenced to the fixed coordinate system of the holding device by the position of point (P′).