Patent · US Active

Method and apparatus for compensating at least one defect of an optical system

US9798249B2 · kind B2 · utility

0Cited by

7References

20Claims

0Family size

Assignees

Carl Zeiss SMT GmbH · DE
Carl Zeiss SMS Ltd. · IL

Inventors

Vladimir Dmitriev · Moran, IL
Ingo Saenger · Heidenheim, DE
Frank Schlesener · Oberkochen, DE
Markus Mengel · Heidenheim, DE
Johannes Ruoff · Aalen, DE

Key dates

Filing date	Aug 12, 2014
Grant date	Oct 24, 2017
Priority date	—
Expiry date	Aug 28, 2035

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70566
WIPO fieldOptics
WIPO sectorInstruments

Abstract

The invention relates to a method for compensating at least one defect of an optical system which includes introducing an arrangement of local persistent modifications in at least one optical element of the optical system, which does not have pattern elements on one of its optical surfaces, so that the at least one defect is at least partially compensated.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.