Patent · US Active

Mixed UBM and mixed pitch on a single die

US9799618B1 · kind B1 · utility

8Cited by
9References
7Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 12, 2016
Grant dateOct 24, 2017
Priority date
Expiry dateOct 12, 2036

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/07025
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

Embodiments are directed to a method of forming a semiconductor chip package and resulting structures having a mixed under-bump metallization (UBM) size and pitch on a single die. A first set of UBMs having a first total plateable surface area is formed on a first region of a die. A second set of UBMs having an equal total plateable surface area is formed on a second region of the die. A solder bump having a calculated solder height is applied to a plateable surface of each UBM. The solder height is calculated such that a volume of solder in the first region is equal to a volume of solder in the second region.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.