Branched siloxanes and methods for synthesis
US9802968B2 · kind B2 · utility
0Cited by
5References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 9, 2016 |
| Grant date | Oct 31, 2017 |
| Priority date | — |
| Expiry date | Aug 9, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/31055
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
The present invention describes branched and functionalized siloxanes and methods for making such compounds. The compounds have a variety of uses. One preferred application is as novel planarizing material for lithogaphy, in which case functionalized branched siloxane, such as an epoxy-modified branched siloxane is particularly useful.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.