Patent · US Active

Probes with fiducial marks, probe systems including the same, and associated methods

US9804196B2 · kind B2 · utility

4Cited by

8References

20Claims

0Family size

Assignee

Cascade Microtech, Inc. · US

Inventors

Bryan Bolt · Beaverton, US
Joseph George Frankel · Beaverton, US

Key dates

Filing date	Jan 15, 2016
Grant date	Oct 31, 2017
Priority date	—
Expiry date	Mar 16, 2036

Classification

Technology area (CPC G)Physics
CPC primaryG01R31/2891
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Probes with fiducial marks, probe systems including the same, and associated methods. The probes include a beam portion and a probe tip that is configured to contact a device under test (DUT), and further include a fiducial mark formed on the beam portion that is configured to facilitate alignment of the probe and the DUT. The fiducial mark is configured to be visible to an optical assembly, and is in focus to the optical assembly within a depth of field of the optical assembly that is smaller than a depth of field over which the beam portion is in focus to the optical assembly. The methods include methods of utilizing and/or manufacturing the probes.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.