Optical imaging arrangement with simplified manufacture

US9804500B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Jens Kugler · Heubach, DE
• Stefan Xalter · Oberkochen, DE
• Jens Prochnau · Oberkochen, DE

Key dates

• Filing date: Mar 1, 2016
• Grant date: Oct 31, 2017
• Expiry date: Mar 10, 2036

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/70975
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An optical imaging apparatus includes an optical element support sub-structure and an auxiliary support sub-structure. The optical element support sub-structure is configured to support an optical element and has a first temporary support interface arrangement. The optical element is configured to form part of a group of optical elements of the optical imaging apparatus configured to transfer, in an exposure process using exposure light, an image of a pattern of a mask onto a substrate. The auxiliary support sub-structure is configured to support an auxiliary component and has a second temporary support interface arrangement. The auxiliary component is configured to execute, during the exposure process, an auxiliary function of the exposure process other than transferring the image of the pattern onto the substrate.