Integrated RF MEMS on ATE loadboards for smart self RF matching

US9806714B2 · kind B2 · utility

Assignee

• ADVANTEST CORPORATION · JP

Inventors

• Xin Ping Zeng · San Jose, US
• Hui-Nan Yu · Baoshan, TW
• Keith Schaub · Austin, US
• Liang Ge · Seattle, US
• Heng Huat Goh · San Jose, US

Key dates

• Filing date: Jan 7, 2014
• Grant date: Oct 31, 2017
• Expiry date: Oct 26, 2035

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R31/2834
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

In a testing device, a method for implementing automatic RF port testing. The method includes attaching a device under test having a plurality of RF pins to a load board, dynamically tuning a plurality of RF ports of the load board to the plurality of RF pins, and automatically matching the plurality of RF ports to the plurality of RF pins with respect to impedance. The method further includes implementing an RF port testing process on the device under test.