Support information display method, maintenance support method of substrate processing apparatus, support information display control apparatus, substrate processing system and recording medium
US9810905B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 6, 2014 |
| Grant date | Nov 7, 2017 |
| Priority date | — |
| Expiry date | May 2, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2027/014
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A support information display method is provided with an acquiring process for acquiring a first image by photographing, via a camera provided in a head mount display, a predetermined part of a substrate processing apparatus as a maintenance object, an estimating process for estimating the support information related to the predetermined part in the first image from information stored in a database, an image creating process for creating a second image by converting the support information estimated in the estimating process into an image, and a displaying process for displaying the second image on the head mount display in order for the operator to visually recognize the support information.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.