Liquid feeding device and substrate treating device
US9811096B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 12, 2015 |
| Grant date | Nov 7, 2017 |
| Priority date | — |
| Expiry date | Nov 12, 2035 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB05B13/0242
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A liquid feeding device that feeds a treatment liquid to a treating device and also recovers the treatment liquid for re-feeding, include feeding tanks having an exhaust passage and an overflow line, and can be switched to one of a feeding mode in which the treatment liquid is fed and a standby mode in which the feeding tank is on standby while accommodating the treatment liquid; a feeding mechanism that feeds the treatment liquid to the treating device from the feeding tank in the feeding mode among the plurality of feeding tanks; a recovery mechanism that recovers and returns the treatment liquid excessive in the treatment device to the feeding tank in the feeding mode; and an on-off mechanism provided in each of the plurality of feeding tanks to block the exhaust passage and the overflow line is provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.