Microelectromechanical device and system with low-impedance resistive transducer
US9815686B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Oct 13, 2016 |
| Grant date | Nov 14, 2017 |
| Priority date | — |
| Expiry date | Oct 13, 2036 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2203/0118
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A microelectromechanical device comprising a mechanical structure extending along a longitudinal direction, linked to a planar substrate by an anchorage situated at one of its ends and able to flex in a plane parallel to the substrate, the mechanical structure comprises a joining portion, which links it to each anchorage and includes a resistive region exhibiting a first and second zone for injecting an electric current to form a resistive transducer, the resistive region extending in the longitudinal direction from an anchorage and arranged so a flexion of the mechanical structure in the plane parallel to the substrate induces a non-zero average strain in the resistive region and vice versa; wherein: the first injection zone is carried by the anchorage; and the second injection zone is carried by a conducting element not fixed to the substrate and extending in a direction, termed lateral, substantially perpendicular to the longitudinal direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.