Patent · US Active

System and method for analyzing a light beam guided by a beam guiding optical unit

US9823119B2 · kind B2 · utility

0Cited by

6References

17Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Matthias Manger · Neukochen, DE
Florian Baumer · Oberkochen, DE

Key dates

Filing date	Nov 9, 2016
Grant date	Nov 21, 2017
Priority date	—
Expiry date	Nov 9, 2036

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB23K26/705
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A system and a method for analyzing a light beam guided by a beam guiding optical unit. The system has a graduated neutral density filter arrangement (120, 520), which is arranged in a far field plane of the beam guiding optical unit and has at least one graduated neutral density filter (121, 521, 522, 523) having a spatially varying transmission, and a light intensity sensor arrangement having at least one light intensity sensor (140, 540), which is arranged in a near field plane of the beam guiding optical unit and is configured to measure (141, 541, 542, 543), for each graduated neutral density filter (121, 521, 522, 523) of the graduated neutral density filter arrangement (120, 520), a light intensity transmitted by each graduated neutral density filter.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.