Ordering block copolymers
US9823568B2 · kind B2 · utility
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10Claims
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Key dates
| Filing date | Jan 18, 2017 |
| Grant date | Nov 21, 2017 |
| Priority date | — |
| Expiry date | Jan 18, 2037 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2201/0149
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for ordering block copolymers including forming a first layer having a first preference mode; and providing a reactive agent in selected regions of the first layer that modifies the selected regions to a second preference mode, wherein the selected regions define other regions of the first layer retaining the first preference mode thereby forming an alignment layer for block copolymers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.