Patent · US Active

Optical system and method of use

US9823579B2 · kind B2 · utility

0Cited by

11References

45Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventor

Olaf Conradi · Sonthofen, DE

Key dates

Filing date	Jan 15, 2015
Grant date	Nov 21, 2017
Priority date	—
Expiry date	Mar 19, 2036

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70891
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A method for improving imaging properties of an optical system and an optical system of this type having improved imaging properties are described. The optical system can have a plurality of optical elements. In some embodiments, an optical element is positioned and/or deformed by mechanical force action and by thermal action. In certain embodiments, one optical element is positioned and/or deformed by mechanical force action and another optical element is deformed by thermal action.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.