Patent · US Active

Charge drain coating for electron-optical MEMS

US9824851B2 · kind B2 · utility

1Cited by

5References

14Claims

0Family size

Inventors

William M. Tong · Palo Alto, US
Alan D. Brodie · Palo Alto, US
Jeffrey W. Elam · Elmhurst, US
Anil U. Mane · Naperville, US

Key dates

Filing date	Oct 11, 2013
Grant date	Nov 21, 2017
Priority date	—
Expiry date	Aug 19, 2036

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/31794
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

A system and method associated with a charge drain coating are disclosed. The charge drain coating may be applied to surfaces of an electron-optical device to drain electrons that come into contact with the charge drain coating so that the performance of the electron-optical device will not be hindered by electron charge build-up. The charge drain coating may include a doping material that coalesces into clusters that are embedded within a high dielectric insulating material. The charge drain coating may be deposited onto the inner surfaces of lenslets of the electron-optical device.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.