Chromatic confocal range sensor comprising a camera portion
US9829312B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 9, 2015 |
| Grant date | Nov 28, 2017 |
| Priority date | — |
| Expiry date | Jun 20, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J3/18
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A chromatic confocal range sensor optical pen comprises a housing, an in/out optical fiber, a chromatically dispersive lens configuration, a reflected light dividing configuration comprising a lower NA zone and a higher NA zone, and a camera portion. The lens configuration is configured to receive source light from the optical fiber and output focused source light to a workpiece surface with axial chromatic dispersion, and receive reflected light from the workpiece surface and focus at least a portion of the reflected light to the fiber aperture. The reflected light dividing configuration is arranged to divide the reflected light into a measurement portion and an imaging portion. In some embodiments, the lower NA zone directs the imaging portion along an imaging optical path to the image detector, and the higher NA zone directs the measurement portion along a measurement optical path to a point proximate to the fiber aperture.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.