Patent · US Active

Semiconductor structure and associated fabricating method

US9831340B2 · kind B2 · utility

5Cited by
2References
16Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 5, 2016
Grant dateNov 28, 2017
Priority date
Expiry dateFeb 5, 2036

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D62/307
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A semiconductor structure is disclosed. The semiconductor structure includes: a substrate of a first conductivity; a first region of the first conductivity formed in the substrate; a second region of the first conductivity formed in the first region, wherein the second region has a higher doping density than the first region; a source region of a second conductivity formed in the second region; a drain region of the second conductivity formed in the substrate; a pickup region of the first conductivity formed in the second region and adjacent to the source region; and a resist protective oxide (RPO) layer formed on a top surface of the second region. An associated fabricating method is also disclosed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.