Patent · US Active

Photodetector with tapered waveguide structure

US9831374B2 · kind B2 · utility

1Cited by
2References
11Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 20, 2013
Grant dateNov 28, 2017
Priority date
Expiry dateDec 20, 2033

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY02E10/52
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

Techniques and mechanisms for providing efficient direction of light to a photodetector with a tapered waveguide structure. In an embodiment, a taper structure of a semiconductor device comprises a substantially single crystalline silicon. A buried oxide underlies and adjoins the monocrystalline silicon of the taper structure, and a polycrystalline Si is disposed under the buried oxide. During operation of the semiconductor device light is redirected in the taper structure and received via a first side of a Germanium photodetector. In another embodiment, one or more mirror structures positioned on a far side of the Germanium photodetector may provide for a portion of the light to be reflected back to the Germanium photodetector.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.