Imprint apparatus, imprint method, and method of manufacturing article
US9835941B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 27, 2014 |
| Grant date | Dec 5, 2017 |
| Priority date | — |
| Expiry date | Oct 27, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70483
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
The present invention provides an imprint apparatus for performing an imprint process of molding an imprint material on a substrate with a mold to form a pattern on the substrate, the apparatus including a supply device configured to supply, to a space between the imprint material on the substrate and the mold, a penetrating gas that penetrates at least one of the mold, the imprint material and the substrate and a condensable gas that is liquefied by pressure rise due to the molding, and a controller configured to control the supply device so as to change at least one of a supply amount of the penetrating gas and a supply amount of the condensable gas based on information on a recipe for the imprint process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.