Hitoshi Nakano
37Patents
7h-index
34Co-inventors
69Inventor score
Filing activity: Feb 17, 1978 → Nov 7, 2018
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5121160A | Exposure method and apparatus | Physics | 61 | Expired |
| US4952060A | Alignment method and a projection exposure apparatus using the same | Physics | 42 | Expired |
| US6665046B2 | Exposure apparatus and device manufacturing method | Physics | 35 | Expired |
| US4166523A | Hydraulic shock absorber for vehicles | Emerging Cross-Sectional Technologies | 26 | Expired |
| US7349064B2 | Immersion exposure technique | Physics | 25 | Expired |
| US6734950B2 | Load-lock chamber and exposure apparatus using the same | Emerging Cross-Sectional Technologies | 15 | Expired |
| US5880653A | Electromagnetic relay and its manufacture | Electricity | 11 | Expired |
| US7561248B2 | Immersion exposure technique | Physics | 6 | Active |
| US6788392B2 | Exposure apparatus, device manufacturing method, gas substituting apparatus, and gas substituting method | Physics | 5 | Expired |
| US6924877B2 | Chemical filter arrangement for a semiconductor manufacturing apparatus | Mechanical Engineering; Lighting; Heating | 5 | Expired |
| US9534968B2 | Fault detection method | Emerging Cross-Sectional Technologies | 4 | Active |
| US10054074B2 | Device for determining abnormality in engine system | Mechanical Engineering; Lighting; Heating | 2 | Active |
| US7186285B2 | Chemical filter arrangement for a semiconductor manufacturing apparatus | Mechanical Engineering; Lighting; Heating | 2 | Expired |
| US9765721B2 | Closed breather disconnection detection method | Emerging Cross-Sectional Technologies | 2 | Active |
| US7145629B2 | Exposure technique | Physics | 2 | Expired |
| US7679718B2 | Immersion exposure technique | Physics | 1 | Active |
| US10632517B2 | Crimp structure, crimping method, and electronic device | Mechanical Engineering; Lighting; Heating | 1 | Active |
| US9835941B2 | Imprint apparatus, imprint method, and method of manufacturing article | Physics | 1 | Active |
| US9829789B2 | Method for determining pattern of mold for imprint, imprint method, and apparatus | Performing Operations; Transporting | 1 | Active |
| US9793637B2 | Crimp structure, crimping method, and electronic device | Electricity | 1 | Active |
| US9945745B2 | Anomaly determination system and anomaly determination method | Emerging Cross-Sectional Technologies | 1 | Active |
| US7420651B2 | Immersion exposure technique | Physics | 1 | Active |
| US10066584B2 | Error determination unit | Emerging Cross-Sectional Technologies | 1 | Active |
| US4709931A | Seal for dampers on motor vehicles | Emerging Cross-Sectional Technologies | 0 | Expired |
| US9454087B2 | Exposure apparatus and device fabrication method | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.