Determination of a corrected variable

US9841685B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Christoph Petri · Oberkochen, DE
• Christian Wald · Munich, DE
• Daniel Runde · Satteldorf, DE

Key dates

• Filing date: Nov 16, 2016
• Grant date: Dec 12, 2017
• Expiry date: Nov 16, 2036

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N2021/95676
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A method for determining a corrected variable, which depends on at least one parameter, in a parameter range of the parameter, includes carrying out a measurement, measurement values of the variable being made available in a plurality of separate and non-overlapping subranges of the parameter range; correcting measurement values of the variable using an approximation, in which measurement values of the variable are approximated with a smooth function and with subrange functions of the subranges of the parameter range. The smooth function allows reproduction of the progression of the variable over the parameter range. The subrange functions permit an individual change of the variable in the subranges. Also disclosed are methods for adjusting imaging optics of an optical system, devices for determining a corrected variable, which depends on at least one parameter in a parameter range, and methods for determining a plurality of corrected wavefront errors in an image field.