Patent · US Active

Method and device for stringing substrates together in coating systems

US9845202B2 · kind B2 · utility

1Cited by

1References

7Claims

0Family size

Assignee

SINGULUS TECHNOLOGIES AG · DE

Inventors

Wolfgang Becker · Eppstein, DE
Edgar Rüth · Kahl am Main, DE
Jochen Heilingbrunner · Hanau, DE

Key dates

Filing date	Oct 12, 2015
Grant date	Dec 19, 2017
Priority date	—
Expiry date	Oct 12, 2035

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB65G2811/0673
WIPO fieldHandling
WIPO sectorMechanical engineering

Abstract

A method and a device for stringing together objects in transport systems, preferably in coating systems, for adjusting the distance between two objects, preferably substrates or substrate holders, being arranged one behind the other, wherein the front object moves at a process speed vp in the transport system and the rear object is at an undefined distance from the front object. The method comprises the following steps: (a) accelerating the rear substrate to an initial speed vx>vp; (b) detecting an increase in the driving torque when the rear substrate moves against the front substrate; (c) delaying the rear substrate by a predetermined value in order to establish a predetermined distance ap from the front substrate; and (d) adjusting the speed of the rear substrate to the process speed vp.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.