Patent · US Active

Micromechanical component having a diaphragm

US9850120B2 · kind B2 · utility

0Cited by

7References

19Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Uwe Schiller · Rötteln, DE
Volkmar Senz · Metzingen, DE
Jochen Franz · Reutlingen, DE
Helmut Grutzeck · Tübingen, DE
Michaela Mitschke · Reutlingen, DE

Key dates

Filing date	Feb 7, 2013
Grant date	Dec 26, 2017
Priority date	—
Expiry date	Dec 12, 2033

Classification

Technology area (CPC H)Electricity
CPC primaryH04R29/00
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Measures are described with the aid of which not only a rupture, but also cracks may be detected in the diaphragm structure of a micromechanical component with the aid of circuit means integrated into the diaphragm structure. At least some circuit elements are integrated for this purpose into the bottom side of the diaphragm, i.e., into a diaphragm area directly adjoining the cavern below the diaphragm.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.