Patent · US Active

Method for displacing at least one optical component

US9851554B2 · kind B2 · utility

0Cited by

1References

19Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Stefan Krone · Aalen, DE
Lars Berger · Heubach, DE

Key dates

Filing date	Jul 14, 2016
Grant date	Dec 26, 2017
Priority date	—
Expiry date	Jul 14, 2036

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/702
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A method for displacing an optical component is disclosed, in which the electrical power maximally required when displacing the component is less than the sum of the maximum electrical powers of the at least two actuators used for the displacement.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.