Patent · US Active

Elevated surface enhanced Raman spectroscopy resonator structures and method of making same

US9857307B2 · kind B2 · utility

1Cited by
3References
19Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 19, 2016
Grant dateJan 2, 2018
Priority date—
Expiry dateAug 19, 2036

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N21/658
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

In improved nonoplasmonic resonator (NPR) structure includes a silicon substrate having an upper surface, and a plurality of columns of silicon extending up from the substrate upper surface. Each of the columns includes a sidewall and terminates at an upper end. An insulation material is disposed on the sidewalls and upper ends of the columns. For each of the columns, the insulation material terminates in a bulge at an upper end of the column. A conductive layer is disposed on the insulation material along the column sidewalls and upper ends.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.