Optical inspection system using multi-facet imaging
US9857312B2 · kind B2 · utility
0Cited by
0References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 15, 2008 |
| Grant date | Jan 2, 2018 |
| Priority date | — |
| Expiry date | Sep 22, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/8806
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical inspection system, the system includes: (i) an image sensor; and (ii) a single optical element, that at least partially surrounds an edge of an inspected object; wherein the optical element is adapted to direct light from different areas of the edge of the inspected object towards the image sensor so that the image sensor concurrently obtains images of the different areas.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.