Internally heated porous filter for defect reduction with liquid or solid precursors
US9863041B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 7, 2015 |
| Grant date | Jan 9, 2018 |
| Priority date | — |
| Expiry date | Aug 16, 2036 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S55/30
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A heated filter assembly for heating gas supplied to a substrate processing system includes a housing defining a cavity, an inner surface and an outer surface. A filter element is arranged inside the cavity of the housing with an outer surface thereof in a spaced relationship relative to the inner surface of the housing. A heat transfer element is arranged inside of the filter element and includes an outer surface and an inner cavity. A plurality of projections is arranged on the outer surface of the heat transfer element in direct physical contact with an inner surface of the filter element. A plurality of portions is arranged on the outer surface of the heat transfer element, is spaced from the inner surface of the filter element and is located between the plurality of projections.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.