Patent · US Active

Protecting a target pump interior with an ALD coating

US9869020B2 · kind B2 · utility

8Cited by

2References

16Claims

0Family size

Assignee

Picosun Oy · FI

Inventors

Timo Malinen · Espoo, FI
Harri Vähämäki · Luoma, FI

Key dates

Filing date	Apr 10, 2013
Grant date	Jan 16, 2018
Priority date	—
Expiry date	Apr 10, 2033

Classification

Technology area (CPC F)Mechanical Engineering; Lighting; Heating
CPC primaryF05C2253/12
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

An apparatus and method for protecting a target pump interior, where a target pump (10) inlet is provided with an inlet manifold (20) and a target pump outlet with an exhaust manifold (30). The target pump interior is exposed to sequential self-saturating surface reactions by sequential inlet of reactive gases according to an ALD method via the inlet manifold into the target pump interior and outlet of reaction residue via the exhaust manifold, while the target pump is kept running or not running. A technical effect of the invention is protecting a pump interior, which can be also an assembled pump interior, by a conformal protective coating.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.