Method for imaging a feature using a scanning probe microscope
US9869696B2 · kind B2 · utility
1Cited by
4References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 3, 2016 |
| Grant date | Jan 16, 2018 |
| Priority date | — |
| Expiry date | Feb 3, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q60/30
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Using a local-potential-driving probe drives a conductor to a known potential while adjacent lines are grounded through the sample body reduces electrostatic scanning microscope signal from adjacent lines, allows imaging of metal lines deeper in the sample. Providing different potentials locally on different conductive lines using multiple local-potential-driving probes allows different conductors to be highlighted in the same image, for example, by changing the phase of the signal being applied to the different local-potential-driving probes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.