Optical grating phase modulator for laser interference photoetching system
US9869857B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 13, 2014 |
| Grant date | Jan 16, 2018 |
| Priority date | — |
| Expiry date | Jan 13, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70408
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical grating phase modulator for a laser interference photoetching system is composed of a substrate, an optical grating, an electric motor and an optical grating positioner. The optical grating, the electric motor and the optical grating positioner are all mounted on the substrate. The optical grating is circular or rectangular, and adopt transmission or reflection type optical grating. A light beam is incident on the optical grating and generates diffraction, and when the electric motor drives the optical grating to continuously move relative to the incident light beam, diffracted light will generate a frequency shift, thereby realizing the phase modulation of the light beam. The optical grating phase modulator has the advantages of high phase modulation speed, high regulation precision and wide regulation range, thereby improving the whole performance of an interference photoetching system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.