Automated multiple location sampling analysis system
US9874475B2 · kind B2 · utility
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12References
29Claims
0Family size
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Key dates
| Filing date | Jul 10, 2015 |
| Grant date | Jan 23, 2018 |
| Priority date | — |
| Expiry date | Apr 6, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/26
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An analysis system (e.g., LIBS) includes a laser source generating a laser beam, a movable optic configured to move said laser beam to multiple locations on a sample, and a spectrometer responsive to photons emitted by the sample at those locations and having an output. A controller is responsive to a trigger signal and is configured in a moving spot cycle to adjust the moveable optic, activate the laser source sequentially generating photons at multiple locations on the sample, and process the spectrometer output at each location.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.