Sample holder and analytical vacuum device
US9875878B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 5, 2013 |
| Grant date | Jan 23, 2018 |
| Priority date | — |
| Expiry date | Dec 5, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/204
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Sample transferring can be securely and easily performed between an FIB device, an electron microscope, and an atom probe device, and atom probe analysis can be performed to a material that easily alters due to atmospheric exposure. A sample holder that holds a sample (12) is provided with an atmosphere-isolation mechanism that prevents the sample from altering due to the atmospheric exposure upon the sample transferring between the devices. There is provided a structure enabling of attaching and detaching a housing (21) of a sample holder leading end of a part of the atmosphere-isolation mechanism in an analytical vacuum device, such as the atom probe device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.